ASTM F1239-2002 通过测量晶隙氧还原表征硅片氧沉淀的标准试验方法
时间:2024-05-25 06:15:30 来源: 标准资料网 作者：标准资料网 阅读：8028
【英文标准名称】:StandardTestMethodsforOxygenPrecipitationCharacterizationofSiliconWafersbyMeasurementofInterstitialOxygenReduction
【原文标准名称】:通过测量晶隙氧还原表征硅片氧沉淀的标准试验方法
【标准号】:ASTMF1239-2002
【标准状态】:作废
【国别】:
【发布日期】:2002
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.06
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:氧;硅片;微电子学;特性;检验
【英文主题词】:deltaO;interstitialoxygen;oxygenprecipitation;oxygenreduction;silicon
【摘要】:ThisstandardwastransferredtoSEMI(www.semi.org)May20031.1Thesetestmethodscovercomplementaryproceduresfortestingtheoxygenprecipitationcharacteristicsofsiliconwafers.Itisassumedthattheprecipitationcharacteristicsarer
【中国标准分类号】:H82
【国际标准分类号】:29_045
【页数】:5P.;A4
【正文语种】:
【英文标准名称】:AnilinePointandMixedAnilinePointofPetroleumProductsandHydrocarbonSolvents,MethodofTestfor(05.01,06.04,10.03)
【原文标准名称】:石油产品和碳氢化合物溶剂的苯胺溶点和混合苯胺溶点测试方法(05.01,06.04,10.03)
【标准号】:ANSI/ASTMD611a-2001
【标准状态】:作废
【国别】:美国
【发布日期】:2001
【实施或试行日期】:
【发布单位】:美国国家标准学会(ANSI)
【起草单位】:
【标准类型】:()
【标准水平】:()
【中文主题词】:石油产品;试验;溶剂
【英文主题词】:petroleumproducts;solvents;testing
【摘要】:Thesetestmethodscoverthedeterminationoftheanilinepointofpetroleumproductsandhydrocarbonsolvents.MethodAissuitablefortransparentsampleswithaninitialboilingpointaboveroomtemperatureandwheretheanilinepointisbelowthebubblepointandabovethesolidificationpointoftheaniline-samplemixture.MethodB,athin-filmmethod,issuitableforsamplestoodarkfortestingbyMethodA.MethodsCandDareforsamplesthatmayvaporizeappreciablyattheanilinepoint.MethodDisparticularlysuitablewhereonlysmallquantitiesofsampleareavailable.MethodEdescribesaprocedureusinganautomaticapparatussuitablefortherangecoveredbyMethodsAandB.Thesetestmethodsalsocoverthedeterminationofthemixedanilinepointofpetroleumproductsandhydrocarbonsolventshavinganilinepointsbelowthetemperatureatwhichanilinewillcrystallizefromtheaniline-samplemixture.Thisstandarddoesnotpurporttoaddressallofthesafetyproblems,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.SpecificprecautionarystatementsaregiveninSections7.
【中国标准分类号】:E30
【国际标准分类号】:
【页数】:
【正文语种】:英语